The Hiden SIMS system is now optionally offered in two
versions – a complete standalone Workstation or a compact bolt-on
module for cluster tool integration. The system provides a fully-featured,
cost-effective, high performance analytical tool for diverse sample
types including alloys, multilayer devices, semiconductors, polymers
and pharmaceuticals.
The multiport UHV analysis chamber incorporates a high-resolution
quadrupole mass spectrometer with mass ranges to 1000 amu, choice of
ion gun with oxygen, inert gas or liquid metal sources, and fast atom
and electron flood guns for insulating samples. The system includes
a fast-entry load lock, specimen transfer mechanism and precision sample
manipulator stage to ensure optimum throughput for all sample types.
Additional mounting ports enable system expansion for multiple surface
analysis techniques and user customisation.
Features include integrated ion gun raster control,
data acquisition, spectral display and ESM Surface Imaging programs
for 2D/3D elemental mapping and depth profiling, with part-per-billion
sensitivity and depth resolution to 5 nanometres. The analysis sequence
is programmable to provide measurement of positive ions, negative ions
and neutral species within single or multiple measurement cycles, automatically
and without user intervention.
The components are additionally available for SIMS
upgrades to existing surface analysis systems..
