For the determination of surface composition, contaminant analysis and for depth profiling
Hiden’s quadrupole mass spectrometers provide vacuum, plasma and surface analysis in nanotechnology applications.
Applications including :
- SIMS depth profiling of nanometre scale thin film structures
- Plasma characterisation for enhancement of device etch processes
- Vacuum diagnostics / temperature programmed desorption analysers in UHV scanning tunnelling microscopes.