 | | | | | Semiconductors Hiden Analytical’s quadrupole mass spectrometer system are available in special configurations to address specific applications within the semiconductor industry including: Semiconductor Research - Plasma characterisation
- Depth profiling
- Reaction kinetics studies
- Plasma source characterisation
Semiconductor Production- Semiconductor process vacuum quality control
- End point detection in ion beam etch
- Deposition rate control in MBE
- Exhaust gas abatement/scrubber system monitoring
- Entrapped gas analysis in semiconductor packages
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