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  • Create Date October 5, 2016
  • Last Updated October 5, 2016

ESPion Langmuir probe for plasma process characterisation

The Hiden ESPion Langmuir-style electrostatic plasma probes, now for operation in both RF and DC plasma, automatically report the critical characteristics of electron density and energy distribution, electron temperature, ion density, plasma potential and floating potential, providing the rapid accurate feedback essential for plasma-based process analysis and control.