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SIMS - for depth profiling, surface composition measurement, and elemental imaging, Hiden's SIMS Workstation provides a complete analytical facility.
Products
A complete SIMS analysis facility.
For static and dynamic SIMS applications.
For surface and depth analysis applications.
Triple filter high performance quadrupole mass spectrometers.
Pulse ion counting detection.
RGA series quadrupole mass spectrometers.
TPD Workstation for thermal desposition studies.
Brochures
 SIMS Brochure TI 181 (670K)
SIMS Brochure TI 181 HiRes (5.64MB)
 MAXIM - Quadrupole SIMS Analyser (562K)
IG5C Caesium Gun (1374K)
Presentations
IMP End Point Detector System for Ion Beam Etch Applications (279K)
SIMS Images (2219K)
SIMS Workstation & Bolt-On Components (4320K)
Application Notes
Energetic (Fast) Neutral Species Analysis (96K)
Energy Distributions of Ions and Atoms from a Magnetron Source (174K)
EQP/EQS Time Resolved Studies in Ion Beam Etch and Plasma Processes (248K)
EQS vs EPIC - Ion Energy Distributions (272K)
Fast Neutrals Analysis (302K)
Technical Information
Data/Control Inputs and Outputs and Special Applications (18K)
EPIC 1000 Series Dimensions (42K)
EQS 1000 Series Probe Schematic (80K)
EQS 300/500 Series Probe Schematic (54K)
SIMS Imaging FoV Schematic (62K)
UHV TPD Custom Shrouds (2752K)
Product Specification
3F/PIC Systems for UHV Temperature Programmed Desorption (85K)
IG20 Ion Gun for Dynamic SIMS (62K)
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Applications
