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SIMS is a high sensitivity surface analysis technique for the determination of surface composition, contaminant analysis and for depth profiling in the uppermost surface layers of a sample.
Applied to analysis within the first few microns of a surface, Hiden's SIMS systems provide depth profiles with depth resolution to 5 nanometres.
The Hiden SIMS workstation provides for high performance static and dynamic SIMS applications for detailed surface composition analysis and depth profiling.
Hiden's elemental SIMS imaging facility provides for high resolution surface chemical mapping.
Hiden Bolt-On Components are available for upgrading existing surface analysis equipment with SIMS facilities.
Products
A complete SIMS analysis facility.
For surface and depth analysis applications.
Pulse ion counting detection.
Quadrupole mass spectrometer components.
Brochures
 SIMS Brochure TI 181 (670K)
SIMS Brochure TI 181 HiRes (5.64MB)
 MAXIM - Quadrupole SIMS Analyser (562K)
Tour of the Hiden SIMS Workstation (6215K))
Posters
High Performance SIMS - Mass and Energy Analyser for SIMS (A2)
High Performance SIMS - Mass and Energy Analyser for SIMS (A3)
Presentations
End Point Detector System for Ion Beam Etch Applications (278K)
Low Energy Ne Scattering from Metal Surfaces using MARISS (323K)
SIMS Images (2218K)
SIMS Workstation and Bolt-On Components (4319K)
Application Notes
Energetic (Fast) Neutral Species Analysis (98K)
EQP/EQS Time Resolved Studies in Ion Beam and Plasma Processes (247K)
EQS vs EPIC - Ion Energy Distributions (271K)
Secondary Ion Mass Spectrometry - Glass Coatings (30K)
Secondary Neutrals Analysis (301K)
SIMS - Imaging of Semiconductor Contact Pads (493K)
SNMS - Depth Profile of Hard Drive Platter (560K)
Sputtered Neutral Mass Spectrometry - Magnetic Layers (89K)
Tour of the Hiden SIMS Workstation (6215K)
Technical Information
EQS 1000 Series Probe Schematic (81K)
EQS 300/500 Series Probe Schematic (53K)
SIMS Imaging FoV Schematic (61K)
Product Specification
IG20 Ion Gun for Dynamic SIMS (61K)
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Applications
