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SIMS Surface Analysis and SNMS Surface Analysis

SIMS is a high sensitivity surface analysis technique for the determination of surface composition, contaminant analysis and for depth profiling in the uppermost surface layers of a sample.

 

Applied to analysis within the first few microns of a surface, Hiden's SIMS systems provide depth profiles with depth resolution to 5 nanometres.

 

The Hiden SIMS workstation provides for high performance static and dynamic SIMS applications for detailed surface composition analysis and depth profiling.

 

Hiden's elemental SIMS imaging facility provides for high resolution surface chemical mapping.

 

Hiden Bolt-On Components are available for upgrading existing surface analysis equipment with SIMS facilities.

 

 

Products

 

A complete SIMS analysis facility.
'Bolt-On' probes.
For surface and depth analysis applications.
Pulse ion counting detection.
Quadrupole mass spectrometer components.

 

 

Brochures

 

icon Mass Spectrometers for Thin Films, Plasma and Surface Engineering (1.1MB)

icon MAXIM - Quadrupole SIMS Analyser (562K)

icon SIMS Brochure TI 181 (670K)

icon SIMS Brochure TI 181 HiRes (5.64MB)

icon Tour of the Hiden SIMS Workstation (6215K)

 

 

Posters

 

icon Electron Impact Sputtered Neutral Mass Spectrometry (SNMS) using the Hiden EQS Energy Resolving Quadrupole Mass Spectrometer - ROLDUC 2012

icon High Performance SIMS - Mass and Energy Analyser for SIMS (A2)

icon High Performance SIMS - Mass and Energy Analyser for SIMS (A3)

 

 

Presentations

 

icon End Point Detector System for Ion Beam Etch Applications (278K)

icon Low Energy Ne Scattering from Metal Surfaces using MARISS (323K)

icon SIMS Images (2218K)

icon SIMS Workstation and Bolt-On Components (4319K)

 

 

 

 

Application Notes

 

icon Energetic (Fast) Neutral Species Analysis (98K)

icon EQP/EQS Time Resolved Studies in Ion Beam and Plasma Processes (247K)

icon EQS vs EPIC - Ion Energy Distributions (271K)

icon Secondary Ion Mass Spectrometry - Glass Coatings (30K)

icon Secondary Neutrals Analysis (301K)

icon SIMS - Imaging of Semiconductor Contact Pads (493K)

icon SNMS - Depth Profile of Hard Drive Platter (560K)

icon Sputtered Neutral Mass Spectrometry - Magnetic Layers (89K)

icon Tour of the Hiden SIMS Workstation (6215K)

 

 

Technical Information

 

icon EQS 1000 Series Probe Schematic (81K)

icon EQS 300/500 Series Probe Schematic (53K)

icon SIMS Imaging FoV Schematic (61K)

 

 

Product Specification

 

icon IG20 Ion Gun for Dynamic SIMS (61K)