Vacuum Process Analysis
Protonated Nitrosamide and its Potential Role in the Release of HONO from Snow and Ice in the Dark
The effects of photolysis on frozen, thin films of water-ice containing nitrogen dioxide (as its dimer dinitrogen tetroxide) have been investigated using a combination of FT-Reflection Absorption IR spectroscopy (RAIRS) and a Hiden mass spectrometer. The observed release of HONO observed using the crucial combination of these techniques was ascribed to a mechanism in which nitrosonium nitrate (NO+NO3-) is formed.
We investigated the degradation mechanism of OTFT performance in the plasma processing. In order to examine the origin of the degradation mechanism due to the plasma exposure, the relationships between operating parameters and plasma species should be analyzed for fabrication of high performance transistor in the plasma processing. So, we extracted the plasma species using quadrupole mass-spectrometry (QMS). Then, we applied this result for analyzing a degradation mechanism of OTFT devices.