The Hiden EQS is a high transmission quadrupole secondary ion mass spectrometry, SIMS, detector including a 45 electrostatic sector for simultaneous ion enegry analysis. Ions are collected on the axis of the device which makes it very popular for fitting as an after-market detector to a wide variety of surface analysis instrumentation. The standard EQS can also be used to monitor the residual gas using an electron impact ionizer sited within the device. This can be employed for detection of sputtered neutrals, although the distance from sample to the ionizer leads to a low sensitivity.

The availability of particle counters which may be operated at ambient pressures of up to 2x10-4 Torr is highly desirable in many current research applications. In one field in particular, it allows mass spectroscopy of gas analysis and processing plasmas to be performed using pressures of this order in the quadrupole mass spectrometer (QMS). These pressures are much closer to those of many processing plasmas so that the sampling of neutral species, in particular, from the plasma is improved. The sampling of ion and neutral species.

The availability of particle counters which may be operated at ambient pressures of up to 2x10-4 Torr is highly desirable in many current research applications. In one field in particular, it allows mass spectroscopy of gas analysis and processing plasmas to be performed using pressures of this order in the quadrupole mass spectrometer (QMS). These pressures are much closer to those of many processing plasmas so that the sampling of neutral species, in particular, from the plasma is improved. The sampling of ion and neutral species.

Among the techniques in common use for mass spectrometric studies of processing plasmas, the so-called “threshold ionisation” (TI) method for examining the neutral species generated in a plasma has been particularly useful. In the past, the technique has been applied using source pressures in the mass spectrometer of about 10-6Torr. With the current availability of particle detectors which can be operated at much higher pressures, it is of interest to examine possible extensions of the TI technique.

Mass Spectroscopy of Metastable Atomic Species in Gas Analysis and Processing Plasmas at High Spectrometer Source Pressures. The availability of particle counters which may be operated at ambient pressures of up to 2x10-4 Torr is highly desirable in many current research applications. In one field in particular, it allows mass spectroscopy of gas analysis and processing plasmas to be performed using pressures of this order in the quadrupole mass spectrometer (QMS). These pressures are much closer to those of many processing plasmas so that the sampling of neutral species, in particular, from the plasma is improved...

Atmospheric pressure plasma jets and its applications for material processing and biomedical treatment are of main interest recently in nonthermal plasma research [1]. Normally this kind of plasmas is operated at an excitation frequency of several tens of kilohertz (ac or pulsed mode) or in radiofrequency (rf) range. Detailed measurements obtained with ICCD images revealed that these jets are not continuous plasmas but consist of high velocity plasmas packs/volumes referred to as "plasma bullets" [2-3].

High power impulse magnetron sputtering (HIPIMS) is a new method for physical vapour deposition (PVD) based on magnetron sputtering [1,2]. It utilises transient impulse (short pulse) glow discharges with very high power and current density (up to 3kWcm-2 and 4Acm-2 respectively at a duty cycle of <5%). Under these conditions the plasma density near the target increases sufficiently to ionise a significant proportion of the sputtered metal ions [2,3] thus creating a high-efficiency metal ion source.

The Hiden SIMS Workstation is a stand-alone, general purpose, UHV SIMS/SNMS analysis system based around the MAXIM analyser. The instrument is both powerful and easy to use with a self-tuning secondary ion column and software controlled ion guns.

The Hiden SIMS Workstation is a stand-alone, general purpose, UHV SIMS/SNMS analysis system based around the MAXIM analyser. The instrument is both powerful and easy to use with a self-tuning secondary ion column and software controlled ion guns.

The Hiden SIMS Workstation is a stand-alone, general purpose, UHV SIMS/SNMS analysis system based around the MAXIM analyser. The instrument is both powerful and easy to use with a self-tuning secondary ion column and software controlled ion guns.