- Name:
- Deposition rate control in MBE
- Filename:
- ti157_XBS_brochure_small.pdf
- Filesize:
- 389.22 kB
- Filetype:
- pdf (Mime Type: application/pdf)
- Created On:
- 01/14/2009 15:19
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- Everybody
- Maintained By:
- Editor
- Hits:
- 1682 Hits
- Updated On:
- 07/22/2010 09:34
Deposition Control and Vacuum Monitoring in MBE Processes. The Hiden XBS quadrupole mass selective detector fulfils key process requirements : Monitoring of evaporating components and fragments (halides, oxides), Vacuum quality assessment, Comprehensive control programs, High contamination resistance.
