- Name:
- AP0067 - O- Density Measurements in the Pulsed-DC Reactive Magnetron Sputtering of Titanium
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- AP0067_Newsletter.pdf
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- 215.66 kB
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- pdf (Mime Type: application/pdf)
- Created On:
- 07/14/2011 15:39
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- Updated On:
- 07/14/2011 15:40
The importance of electronegative species in technological plasmas is currently of great interest, both from a theoretical and experimental point of view, with much of the recent work concentrating on reactive ion etching discharges.
