Mass spectrometers for vacuum, gas, plasma and surface science

A range of ion source options for residual gas analysis

Hiden Analytical produces a wide variety of ion source types which can be fitted to our full range of RGAs. Ion source types are crucial to the performance of a RGA and having the ability to specify which source you require ensures our RGAs are custom configured for specific applications.

Ion Source


Thermal analysis TA/MS

Catalysis studies

Reaction kinetics

Fuel cells


Environmental monitoring

Related Products

RGA Series





Standard RGA A radially symmetric configuration for general applications

UHV Low Profile Optimised for UHV TPD Studies enabling closer proximity of the ion source to the evolution surface

Closed Source For high pressure studies with direct gas input used in conjunction with a differential pumping stage for the analyser

XBS Cross Beam Configured specifically for MBE deposition rate monitoring and control

Basic Cross Beam Used for analysis of molecular beams, where the beam may be liable to condense on ioniser surfaces. The source features an unobstructed pathway through the ionising region of the source. External shrouds are available to protect the quadrupole mass filter from condesing species

Laser Cross Beam Source Includes two orthagonal unobstructed pathways for laser proton ionisation within the source cage region, providing an alternative to electron impact and electron attachment ionisation

4 Lens Ion Optics with Integrated Ioniser Additionally enables analysis of low energy positive and negative ions generated externally to the analyser. For electron, photon and laser stimulated desorption studies

Platinum Ion Source This source is configured for improved operation in reactive gases. Radially symmetric, UHV compatible

Gold Plated Ion Source This source is configured to minimise the effects of source outgassing. Radially symmetric, UHV campatible. Available as Standard or Low Profile options


- Standard filament material is oxide coated iridium

- Other materials available on request

- Ion source options are interchangeable

- Open and closed sources available

- Range of cross beam sources available

- Standard and low profile options available


The system is supplied with MASsoft 7 Professional Edition software.

This Windows 8 compatible software allows control of the instrument via USB 2.0, RS232 or Ethernet. Provides comprehensive I/O for data output and for reading data from external devices for integration and display with mass spectrometer data.