Mass spectrometers for vacuum, gas, plasma and surface science

The Hiden HPR-20 QIC R&D specialist gas analysis system is a bench-top mass spectrometer for the monitoring of evolved gases and vapours.

Applications

Thermal Analysis TA/MS

Catalysis

Fuel cells

CVD / MOCVD / ALCVD

Environmental monitoring

Overview

A triple filter mass spectrometer is included providing improved resolution and abundance sensitivity with an ultimate detection limit of 5 ppb subject to spectral interference.

The HPR-20 QIC R&D is offered with a wide range of interfaces for connection to thermal equipment and is configured with Hiden’s heated Quartz Inert Capillary (QIC) for continuous sampling of gases and vapours.

Backing and bypass pumping is provided by a high performance scroll pump. Gas sampling is continuous with a gas sample flow rate user configurable/selectable in the range < 1 ml/min to > 20 ml/min.

Features

- Triple filter mass spectrometer

- Mass range options 200, 300, 500 or 1000 amu

- Enhanced abundance sensitivity

- Detection to 5 ppb

- APSI-MS soft ionisation mode

Software

The system is supplied with MASsoft 7 Professional Edition software.

This Windows 8 compatible software allows control of the instrument via USB 2.0, RS232 or Ethernet. Provides comprehensive I/O for data output and for reading data from external devices for integration and display with mass spectrometer data.

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