Mass spectrometers for vacuum, gas, plasma and surface science

Systems for the examination of components present in a vessel or evolved from a process

All Hiden residual gas analysers are application tested and calibrated to provide the highest quality performance, and they are backed by a 3 year warranty and lifetime service support.



Residual gas analysis

Leak Detection


Outgassing studies

Bakeout cycles

Pump performance

Process gas contaminants

Related Products

HAL 201 RC


3F Series RGA


The Hiden RGA Series includes three specification levels :

HALO RGA  - for residual gas analysis
Suitable for vacuum fingerprint analysis, leak detection and trend analysis

3F Series RGA - triple filter mass spectrometers for analytical applications
Triple filter technology provides extended mass ranges, increased mass resolution, enhanced sensitivity and improved contamination resistance for more demanding analytical applications.

3F-PIC - pulse ion counting detection for fast event studies
Ultra-fast pulse ion counting detection provides seven decade continuous dynamic range with optimum sensitivity at UHV/XHV


- Mass range options: 50, 100, 200, 300, or 510 amu.

- Detector options give sensitivity for high vacuum to ultra high vacuum, UHV.

- Stability (less than ±0.5% height variation over 24 h)

- MASsoft control via RS232, USB or multiple systems via Ethernet LAN

- Fast access for Histogram, Trend Analysis and Analog peak displays

- Mixed mode scanning e.g. Trend, Histogram and Analog peaks in multiple-windows

- Simultaneous real time display of graphical and tabular trend analysis data

- Cursor for peak height identification under mouse control

- Real time background subtract, Automatic mass scale alignment

- Data export facility to ASCII format and to all Windows devices

- netMASsoft, an on board web server for RGA operation from your Web browser


The systems are supplied with MASsoft 7 Professional Edition software.

This Windows 8 compatible software allows control of the instrument via USB 2.0, RS232 or Ethernet. Provides comprehensive I/O for data output and for reading data from external devices for integration and display with mass spectrometer data.