Mass spectrometers for vacuum, gas, plasma and surface science

A dual mode RGA system for vacuum diagnostics and process monitoring

The Hiden HMT quadrupole mass spectrometer is a unique dual mode RGA system capable of operating at pressures up to 4 x 10-3 mbar without the need for differential pumping. Operation at this pressure is achieved using a specially designed ion source/quadrupole filter combination and software which corrects for abundance non-linearity. The unique high pressure specification makes the HMT ideal for process monitoring applications.

HMT

Applications

Vacuum processing

Residual gas analysis

Related Products

HPR-30

PSM

RGA Series

Overview

The HMT can also operate in RGA mode in the same way as a traditional quadrupole RGA. Faraday / electron multiplier detectors provide partial pressure sensitivities in the 10-13 mbar range.

Features

- HMT mode for high pressure operation to 4x10-3 Torr (min detectable partial  pressure 4 x 10-8 Torr)

- RGA mode for high sensitivity operation at P < 10-4 Torr (min detectable partial pressure 1 x 10-11 Torr)

- 100 amu mass range, Remote (PC) Control interface via MASsoft Professional PC software

- Stability (less than ±1% height variation over 24 h)

- MASsoft software control via RS232, USB or multiple systems via Ethernet LAN

- Fast access, mixed mode scanning  Trend and Analog in multiple windows for example

- Simultaneous real time display of graphical and tabular trend analysis data

- Cursor for peak height identification under mouse control

- Real time background subtract, Automatic mass scale alignment

- Data export facility to ASCII format and to all Windows devices

- Dynamic Data Exchange facility for real time data transfer to other DDE client compatible Windows™ applications

  e.g. Excel, SPC-IV statistical process control software

Software

The system is supplied with MASsoft 7 Professional Edition software.

This Windows 8 compatible software allows control of the instrument via USB 2.0, RS232 or Ethernet. Provides comprehensive I/O for data output and for reading data from external devices for integration and display with mass spectrometer data.