DUAL MODE RGA systems for Vacuum Diagnostics and Process Monitoring

Process Monitoring RGA/ Leak Detection Virtual Leaks / Desorption Outgassing studies Bakeout cycles Pump Performance Chamber / Process gas Contaminants

Hiden HMT RGA quadrupole mass spectrometers a unique dual mode RGA system examination of components present in a vessel or evolved from a process, featuring:

 

• HMT mode for high pressure operation to 4x10^-3 Torr (min pressure 4x10^-8 Torr).
• RGA mode for high sensitivity operation at P < 10^-4 Torr (min pres1x10^-11 Torr).
• 100 amu mass range, Remote (PC) Control interface via MASsoft HMT.
• Stability (less than ±1% height variation over 24 h).
• MASsoft HMT control via RS232, RS485 or multiple systems via Ethernet LAN.
• Fast access, mixed mode scanning e.g. Trend and Analog in multiple-windows.
• Simultaneous real time display of graphical and tabular trend analysis data.
• Cursor for peak height identification under mouse control.
• Real time background subtract, Automatic mass scale alignment.
• Data export facility to ASCII format and to all Windows devices.
• Dynamic Data Exchange facility for real time data transfer to other DDE client compatible Windows™ applications eg Excel, SPC-IV statistical process control software.

For more information, contact Hiden using the Online Contact Form.