Mass spectrometers for vacuum, gas, plasma and surface science

A system for UHV analysis of neutrals, radicals and ions

The Hiden EPIC and IDP have all the features of high performance RGAs - but with the addition of pole bias mid-axis potential and negative ion capability making them outstanding research grade mass spectrometers.



Surface science

Thin film & surface engineering


Molecular beam studies

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The EPIC system is factory-upgradeable for the inclusion of an energy-filter, either the Bessel box or 45 degree sector field type, ensuring compatibility with the Hiden plasma/SIMS series including the EQP, EQS, PSM and SIM probes.


- Mass range options to 2500 amu, 6 or 9 mm pole diameter options

- Enhanced long-term Stability (less than ±0.5% height variation over 24 h)

- Ion Energy distribution by mid-axis potential scanning ±100 V, 1000 eV Option

- Ion source control for soft ionisation and appearance potential mass spectrometry

- Enhanced sensitivity for high mass transmission, Automatic mass scale alignment

- Pulse Ion Counter for continuous 1: 107 c/s decade dynamic range

- Extended dynamic range  to 5x1010 c/s with Faraday option

- Enhanced contamination resistance via the RF-only pre-filter stage

- Signal gating 100 nano second resolution for energy & mass distributions vs time or TOF studies

- Temperature reading integrated into data displays for thermal desorption applications

- Integral UHV compatible shroud, Liquid Nitrogen cooled shroud option

- MASsoft control via RS232, USB or Ethernet LAN

- Upgradeable to Plasma / SIMS specification


The system is supplied with MASsoft 7 Professional Edition software.

This Windows 8 compatible software allows control of the instrument via USB 2.0, RS232 or Ethernet. Provides comprehensive I/O for data output and for reading data from external devices for integration and display with mass spectrometer data.


Hiden EPIC (6 MB)