Home Product Catalogue Triple Filter Quadrupoles EPIC Quadrupole mass spectrometers for UHV analysis of neutrals, radicals and ions.
EPIC Quadrupole mass spectrometers for UHV analysis of neutrals, radicals and ions.

Triple Filter Quadrupoles for Precision Gas Analysis and Scientific Applications. 

 

  • Neutrals, Radicals, Positive & Negative ions.
  • Electron Attachment Studies.
  • Surface Science, Molecular Beam Studies.
  • UHV Temperature Programmed Desorption.
  • High Performance RGA.
  • Desorption / Outgassing studies / Bakeout cycles.
  • Chamber / Process gas Contaminants

 

Hiden EPIC mass spectrometers for high precision scientific, process applications and UHV analysis of neutrals, radicals, and ions, featuring:

 

  • High Sensitivity, Enhanced detection from 100% to 5ppb.
  • Mass range options to 2500 amu, 6,9 or 12 mm pole diameter options.
  • Enhanced long-term Stability (less than ±0.5% height variation over 24 h).
  • Ion Energy distribution by mid-axis potential scanning ±100 V, 1000 eV Option.
  • Ion source control for soft ionisation and appearance potential mass spectrometry.
  • Enhanced sensitivity for high mass transmission, Automatic mass scale alignment.
  • Pulse Ion Counter for continuous 7 decade dynamic range, Faraday option to 5x1010
  • Enhanced contamination resistance via the RF-only pre-filter stage.
  • Signal gating 1µs resolution for energy & mass distributions vs time or TOF studies.
  • Temperature reading integrated into data displays for thermal desorption applications.
  • Integral UHV compatible shroud, Liquid Nitrogen cooled shroud option.
  • MASsoft control via RS232, RS485 or Ethernet LAN.
  • Upgradeable to Plasma / SIMS specification.

 

 

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Brochures

 

icon Mass Spectrometers for Residual Gas Analysis - RGA (1.35MB)

 

 

Posters

 

icon Mass Analysis of CF3I Decomposition in a Surface Barrier Discharge - GEC 2011 (2.8MB)

icon Mass Spectroscopy of Metastable Atomic Species in Gas Analysis and Processing Plasmas at High Spectrometer Source Pressures - AVS 2011 (1.6MB)

icon Mass Spectroscopy of Metastable Species during Plasma Processing - GEC 2011 (2.1MB)

 

 

 

 

Application Notes

 

icon A Comparison of Positive and Negative Ion RGA Methods (534KB)

icon EQS vs EPIC - Ion Energy Distributions (272K)

icon Fullerene Ionisation (264K)

 

 

Technical Information

 

icon 3F Series Quadrupole Mass Spectrometer Dimensions (290K)

icon Data Control Inputs and Outputs and Special Applications (17K)

icon EPIC 1000 Series Dimensions (42K)

icon Programmable Signal Gating Module (217K)

icon RGA: Minimum Detectable Partial Pressure (108K)

 

 

Gallery

 

 

 

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