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Mass spectrometers for vacuum, gas, plasma and surface science

A system for multiple source monitoring in MBE deposition applications

Molecular beam sources require accurate control for reproducible production quality thin film growth. Hiden’s XBS system provides in-situ monitoring of multiple sources with real-time signal output for precise control of the deposition.

XBS

Applications

MBE monitoring and control

Molecular beam studies

Multiple beam source analysis

High performance RGA

Desorption

Outgassing studies

Bakeout cycles

Process gas contaminents

Related Products

HALO 201 MBE

RGA Series

Ion Source Options

Overview

The high sensitivity and fast data acquisition of the XBS system provide signals for control of growth rates from 0.01 Angstrom per second.

Features

- High Sensitivity, Enhanced detection from 100% to 5ppb, mass range to 510 amu

- Enhanced long-term Stability (less than ±0.5% height variation over 24 h)

- Crossbeam ion source, beam acceptance through +/- 35° to transverse axis

- Ion source control for soft ionisation and appearance potential mass spectrometry

- Enhanced sensitivity for high mass transmission, Automatic mass scale alignment

- 2mm beam acceptance aperture – configured to specific user application

- Enhanced contamination resistance via the RF-only pre-filter stage

- Integral UHV compatible water-cooled shroud

- Detection limits down to 30 ions/second in molecular beam studies

- Monitor growth rates of 1Å/minute and lower

- Windows™ based MASsoft control via RS232, USB or Ethernet LAN

Software

The system is supplied with MASsoft 7 Professional Edition software.

This Windows 8 compatible software allows control of the instrument via USB 2.0, RS232 or Ethernet. Provides comprehensive I/O for data output and for reading data from external devices for integration and display with mass spectrometer data.