A state of the art secondary ion mass spectrometer for static and dynamic SIMS and SNMS applications.

Integral energy filter for ion acceptance at 30° to the probe axis High transmission SIMS extraction ion optics High efficiency electron impact SNMS ionizer Triple mass filter Pulse ion counting detector Control electronics with Windows MASsoft PC software Raster control for imaging and depth profiling

Specification for MAXIM Analyser

• SIMS - 3x10⁶ cps/nA for ²⁷Al⁺ sputtered from Al target by 5 keV Ar⁺ ions
• SNMS - >80 cps/nA for ¹⁰⁷Ag sputtered from Ag target by 5 keV Ar⁺ ions

MAXIM the most sensitive quadrupole SIMS analyser for the most sensitive elemental analysis technique.

• Mass range options: 300amu, 500amu or 1000amu
• Detector: Ion counting detector, Positive and Negative ion detection, 10⁷ cps
• Mass filter: Triple filter
• Pole diameter: 9mm
• Bakeout: 250°C
• Ion energy filter: 30° angular acceptance
• Ioniser: Electron bombardment, single filament for SNMS and RGA

Brochures

 MAXIM - Quadrupole SIMS Analyser (562K)

 Secondary Ion Mass Spectrometry - Glass Coatings (30K)

 SIMS - Imaging of Semiconductor Contact Pads (493K)

 SNMS - Depth Profile of Hard Drive Platter (560K)

 Sputtered Neutral Mass Spectrometry - Magnetic Layers (89K)

 Tour of the Hiden SIMS Workstation (6215K)

 Programmable Signal Gating Module (217K)