State of the art ion gun for surface and depth analysis applications.

Static and Dynamic SIMS Auger Electron Spectroscopy Ion Beam Sputtering Surface Science Studies Rastering / Depth Profiling

The Hiden IG20 Ion Gun for static and dynamic SIMS, featuring:

• Intense ion beam with 100 µm spot size and energies from 0.5 – 5 keV.
• High current density, up to 4.5 mA/cm2.
• Electron impact ion source with Argon and Oxygen capability.
• Steering optics for line scattering and beam rastering in depth profiling.
• 3° offset in the ion gun column for optimum rejection of neutrals.
• Beam blanking facility for rapid beam switching in rastering applications.
• Source differential pumping for reduced chamber gas load.
• Easily replaceable twin filament assembly.
• Sweep rates down to 64 µs.
• Integrated operation with SIM and EQS probes for direct raster rate / area control.

Brochures

 IG20 Oxygen/Gas Gun (840K)

 Fast Neutrals Analysis (302K)

 Secondary Ion Mass Spectrometry - Glass Coatings (30K)

 Secondary Neutrals Analysis (301K)

 SIMS - Imaging of Semiconductor Contact Pads (493K)

 SNMS - Depth Profile of Hard Drive Platter (560K)

 Sputtered Neutral Mass Spectrometry - Magnetic Layers (89K)

 Tour of the Hiden SIMS Workstation (6215K)