State of the art FAB / ion gun for surface and depth analysis applications

Static and Dynamic SIMS Studies Auger Electron Spectroscopy Ion Beam Sputtering FAB/SIMS studies of insulators Surface Science Studies Rastering / Depth Profiling

The Hiden IFG200 Fast Atom Bombardment / Ion Gun for static and dynamic SIMS, featuring:

• 2mm atom or ion beam at energies from 0.5 – 5 keV.
• Charge exchange chamber for ion ® fast atom conversion for FAB studies.
• Electrostatic deflection lens for clean FAB beam.
• High current density and stable positioning.
• 3° offset in the ion gun column for optimum rejection of neutrals in ion beam mode.
• Inert gas and Oxygen capability.
• Differentially pumped source region.
• Easily replaceable twin filament assembly.
• Control unit fully compatible with IG20 high-brightness ion gun.
• Integrated operation with SIM and EQS probes for direct raster rate / area control.

SIMS Brochure TI 181 (670K)

 SIMS Brochure TI 181 HiRes (5.64MB)