Home Product Catalogue Surface Science & Materials Analysis EQS, a Secondary Ion Mass Spectrometer bolt on SIMS Analyser.
EQS, a Secondary Ion Mass Spectrometer bolt on SIMS Analyser.

State of the art, bolt-on SIMS probe for integration into your existing UHV surface science chamber

 

  • Static / Dynamic SIMS with energy analysis
  • Integral front end ioniser for RGA
  • Composition / contamination analysis
  • Depth profiling
  • Leak detection and desorbed gas analysis
  • Compatible with Hiden SIMS Workstation
  • Suitable for FIB-SIMS integration
 

 

Specification for 1000 Series EQS

  • 5x105 cps/nA for 27Al+ from Al target under 5keV Ar+ bombardment
  • 100 cps/nA for Cs(CsI)3+ at 913amu from CsI target under 5keV O2+ bombardment

 

The EQS secondary ion mass spectrometer for the analysis of secondary positive and negative ions from solid samples, featuring:

 

  • High Sensitivity Pulse Ion Counting detector with 7 decade dynamic range.
  • Raster Control for enhanced depth profiling and imaging with integrated signal gating.
  • 45° Electrostatic Sector analyser, scan energy at 0.05 eV increments/ 0.25eV FWHM.
  • Minimum perturbation of ion flight path & constant ion transmission at all energies.
  • Triple filter Quadrupole, mass options to 2500 amu.
  • Penning Gauge and interlocks to provide over pressure protection.
  • Differentially pumped option for use in high pressure environments.
  • MASsoft control via RS232, RS485 or Ethernet LAN.
  • Easily interfaced to existing systems

 

 

Brochures

 

icon SIMS Brochure TI 181 (670K)

icon SIMS Brochure TI 181 HiRes (5.64MB)

 

 

Posters

 

icon High Performance SIMS - Mass and Energy Analyser for SIMS (A2)

icon High Performance SIMS - Mass and Energy Analyser for SIMS (A3)

 

 

 

 

Application Notes

 

icon Energetic (Fast) Neutral Species Analysis (97K)

icon EQP/EQS Time Resolved Studies in Ion Beam and Plasma Processes (246K)

icon EQS vs EPIC - Ion Energy Distributions (271K)

icon Fast Neutrals Analysis (302K)

icon Secondary Neutrals Analysis (301K)

 

Gallery

 

 

 

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