Complete energy resolved mass speciation and mass resolved energy analysis of secondary ions and neutrals in your plasma:

Reactive Ion Etching Plasma Deposition Studies Ion implantation / Laser Ablation Residual Gas Analysis Leak Detection

The PSM is a differentially pumped mass spectrometer for the analysis of secondary ions and neutrals from plasma process, featuring:

• Differentially pumped manifold with mounting flange to process chamber.
• High sensitivity / stability triple filter quadrupole, mass range options to 510amu.
• Pulse ion counting detector with 7 decade dynamic range.
• Energy analysis option by pole bias scanning 100eV.
• Ion extraction / exclusion optics with tuneable integral ioniser for Appearance Potential MS.
• Penning gauge and interlocks to provide over pressure protection.
• Signal gating and programmable signal gating option for time resolved studies in pulsed plasma.
• Analysis of neutrals and radicals as standard, +ve / -ve ion analysis option.
• Mu-Metal, Radio-metal shielding options, high pressure operation options.
• MASsoft control via RS232, RS485 or Ethernet LAN.

 Mass Spectrometers for Thin Films, Plasma and Surface Engineering (1.1MB)

 Energetic (Fast) Neutral Species Analysis (97K)