Mass spectrometers for vacuum, gas, plasma and surface science


High Purity Gas Analysis

For industrial and research applications

Measures the concentration of gases and vapours in real time


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Mass range

200, 300 or 510 amu

Minimum detectable concentration


Maximum detectable concentration


Sample inlet pressure

100mbar to 2bar abs


Options for sampling at pressures up to 30Bar

Response time to gas concentration change

300 milliseconds

Fast measurement speed

Up to 500 measurements per second

Sample flow required

Options for < 1 atm cc/min to 20 atm cc/min


Corrosive gas sampling options

For industrial and research applications

Hiden gas analysis systems feature the capability to track and monitor real time contamination levels of identified contaminants whilst simultaneously scanning for unknowns.


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High purity gas supply is of prime importance to many industrial and research applications. Gas contamination can have a devastating effect on product quality and yield. Mass spectrometry provides unparalleled versatility for the detection of contaminants in pure gas streams with detection capability to sub PPM level for most species.

Applications include :
Satellite manufacture purge gas analysis.
Gas analysis of contaminants in gas supply in Hot Isostatic Processing (HIP)
Analysis of impurities in closed cycle refrigerator compressor gas
High purity hydrogen analysis in steel mill reducing processes
Semiconductor process gas supply

Hiden's range of multi stream gas inlets provide for monitoring 4 or 8 gas streams. Hiden's Hydra system can monitor up to 80 gas streams.