HAL 3F Mass Spectrometers

Surface Science Molecular Beam Studies UHV Temperature Programmed Desorption High Performance RGA Cluster Studies Leak Detection / Virtual Leaks Desorption / Outgassing studies / Bakeout cycles Chamber / Process gas Contaminants

Hiden HAL 3F mass spectrometers for high precision scientific, process applications and UHV applications, featuring:

• High Sensitivity, enhanced detection from 100% to 5ppb.
• Mass range options to 2500 amu with Automatic mass scale alignment.
• Enhanced long-term Stability (less than ±0.5% height variation over 24 h).
• Ion source control for soft ionisation and appearance potential mass spectrometry.
• Enhanced sensitivity for high mass transmission, 6, 9 or 12 mm pole diameter options.
• Available with a wide choice of integral ioniser configurations, e.g. low profile, XBS.
• Enhanced contamination resistance via the RF-only pre-filter stage.
• Temperature reading integrated into data displays for thermal desorption applications.
• Pulse Ion Counter detector option for continuous 7 decade dynamic range.
• MASsoft control via RS232, RS485 or Ethernet LAN.

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