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Mass spectrometers for vacuum, gas, plasma and surface science

IMP-EPD

A system for ion etch control and optimum process quality

The IMP-EPD is a differentially pumped, ruggedised secondary ion mass spectrometer for the analysis of secondary ions from the ion beam etch process. The system includes integrated software with process specific algorithms developed for optimum process control.

IMP-EPD

Applications

End point analysis

Target impurity determination

Quality control/SPC

Residual gas analysis

Leak detection

Related Products

PSM

EQS

Overview

The IMP-EPD is a differentially pumped, ruggedised secondary ion mass spectrometer for the analysis of secondary ions  from the ion beam etch process. The system includes integrated software with process specific algorithms developed for optimum process control.

The IMP-EPD system is process proven for the production of high specification thin film devices for applications including magnetic thin films, high temperature superconductors and III-V semiconductors.

Features

- High Sensitivity SIMS / MS with Pulse Ion Counting Detector

- Triple filter Quadrupole, 300 amu mass range is standard

- Differentially Pumped Manifold With Mounting Flange to Process Chamber

- Ion Optics with Energy Analyser and integral ioniser

- Penning Gauge and interlocks to provide over pressure protection

- Data System with integration to the process tool

- Stability (less than ±0.5% height variation over 24 h)

- MASsoft control via RS232, RS485 or Ethernet LAN

- Programmable DDE, Parallel Digital I / O, RS232 Scripting Communication

Software

The system is supplied with MASsoft 7 Professional Edition software.

This Windows 8 compatible software allows control of the instrument via USB 2.0, RS232 or Ethernet. Provides comprehensive I/O for data output and for reading data from external devices for integration and display with mass spectrometer data.

Application Examples

IBM Almaden Research Center | Advanced Instrumentation

Nanodevice Fabrication : Ion Beam Nano-Fabrication

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