Hiden EQS  – Secondary Ion Mass Spectrometer

State of the art, bolt-on SIMS probe for integration
into your existing UHV surface science chamber.

• Static / Dynamic SIMS
• Rugged General purpose surface analysis
• Integral front end ioniser for RGA and SNMS
• Ion Gun / FAB gun compatible
• Composition / contamination analysis
• Depth profiling
• Leak Detection
• Compatible with Hiden SIMS Workstation

Specification for 1000 Series EQS

• 100cps/nA for Cs(CsI)₃⁺ at 913amu

(using a cesium iodide target with an oxygen ion beam at 5keV)

 

The EQS is a differentially pumped secondary ion mass spectrometer for the analysis of secondary positive and negative ions and neutrals from solid samples, featuring:

 

• High Sensitivity Pulse Ion Counting detector with 7 decade dynamic range.
• SIMS imaging option with sub-micron resolution.
• Raster Control for enhanced depth profiling capability.
• 45° Electrostatic Sector analyser, scan energy at 0.05 eV increments/ 0.25eV FWHM.
• Minimum perturbation of ion flight path & constant ion transmission at all energies.
• Differentially pumped Triple filter Quadrupole, mass to 2500 amu.
• High Sensitivity / Stability Pulse Ion Counting Detector.
• Penning Gauge and interlocks to provide over pressure protection.
• MASsoft control via RS232, RS485 or Ethernet LAN.

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