The Hiden SIMS Workstation, an integrated UHV /
SIMS facility for advanced surface analysis, featuring:
- Hiden EQS SIMS analyser with operating under MASsoft O/S for
ppb analysis.
- Mass / Energy analyser for positive & negative ions, neutrals,
and radicals
- Choice of differentially pumped Hiden IG20 Ion, IFG200 FAB
or high performance liquid gallium guns as primary excitation
source.
- Integral ion gun raster control with signal gating for depth
profiling.
- Electron flood gun option for charge neutralisation in insulator
studies.
- Liquid nitrogen cold trap and vacuum chamber bakeout heaters.
- Fast sample transfer, sample holder and manipulator with load
lock.
- 4 axis X, Y, Z, and theta UHV manipulator for optimum sample
positioning.
- SIMS elemental imaging option with ESM LabVIEW SIMS Imaging
program.
- Static SIMS Spectral Library available.
- Automatic SIMS ion optics lens tuning, and automatic mass
alignment for optimum SIMS performance.
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