The Hiden Plasma Workstation, an integrated RF-ICP
reactor / plasma analyser system for all you plasma process studies,
featuring:
- Cylindrical quartz cell 100mm diameter.
- 4 turn copper induction coil with coil cooling facility and
100mm coil adjustment.
- 13.56MHz RF generator with up to 200W power with matching
network.
- RF screen (440 x 340 x 340 mm).
- Air cooling, manual or automatic Dual stream flow control.
- Twin Turbo molecular pumping manifold for differential operation.
- Capacitance pressure gauge and cell pressure display.
- Hiden EQP 500 plasma analyser with 100mm Z shift operating
under MASsoft O/S.
- Mass / Energy analyser for positive & negative ions, neutrals,
and radicals.
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