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Hiden EPIC Systems with Pulse Ion Counting and Pole
Bias Control
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Triple Filter Quadrupoles for Precision Gas Analysis
and Scientific Applications.
- Neutrals, Radicals, Positive & Negative ions.
- Electron Attachment Studies.
- Surface Science, Molecular Beam Studies.
- UHV Temperature Programmed Desorption.
- High Performance RGA.
- Desorption / Outgassing studies / Bakeout cycles.
- Chamber / Process gas Contaminants
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Hiden EPIC mass spectrometers for high precision
scientific, process applications and UHV analysis of neutrals,
radicals, and ions, featuring:
- High Sensitivity, Enhanced detection from 100% to 5ppb.
- Mass range options to 2500 amu, 6,9 or 12 mm pole diameter
options.
- Enhanced long-term Stability (less than ±0.5% height
variation over 24 h).
- Ion Energy distribution by mid-axis potential scanning ±100
V, 1000 eV Option.
- Ion source control for soft ionisation and appearance potential
mass spectrometry.
- Enhanced sensitivity for high mass transmission, Automatic
mass scale alignment.
- Pulse Ion Counter for continuous 7 decade dynamic range, Faraday
option to 5x1010
- Enhanced contamination resistance via the RF-only pre-filter
stage.
- Signal gating 1µs resolution for energy & mass distributions
vs time or TOF studies.
- Temperature reading integrated into data displays for thermal
desorption applications.
- Integral UHV compatible shroud, Liquid Nitrogen cooled shroud
option.
- MASsoft control via RS232, RS485 or Ethernet LAN.
- Upgradeable to Plasma / SIMS specification.
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