for Residual Gas Analysis

RGA Series

Systems for the examination of components present in a vessel or evolved from a process

Measures the concentration of gases and vapours in real time
Mass range 50,100, 200, 300 or 510 amu
Minimum detectable concentration (HALO) 2X10-13 mbar
Minimum detectable concentration (3F) 2X10-14 mbar
Minimum detectable concentration (3F-PIC) 2X10-15 mbar
Ion Source Range of electron impact ion source types available
Ion Source control Yes
Electron emission Software variable 1µA to 2mA
Electron energy Software variable 0V to 150 eV
Ion energy Software variable 0V to 10 eV
Detector Faraday cup and electron multiplier
Mounting flange (HALO) DN-35-CF (2.75″/70mm OD Conflat type)
Mounting flange (3F – Triple Filter) DN-63-CF (4.5”/114mm OD Conflat type)

Ion Source Options

A range of electron impact ion sources that can be supplied with any of our residual gas analysers

Configures residual gas analysers for specific applications, molecular beam analysis for example

Standard RGA A radially symmetric configuration for general applicationsv
UHV Low Profile Optimised for UHV TPD Studies
Closed Source For direct gas input with differential pumping stage for the analyser
XBS Cross Beam For MBE deposition rate monitoring and control
Basic Cross Beam Use where the beam may be liable to condense on ioniser surfaces
Laser Cross Beam 2 orthogonal unobstructed pathways for laser photon ionisation
4 Lens Ion Optics with Integrated Ioniser For electron, photon and laser stimulated desorption studies
Platinum Ion Source For improved operation in reactive gases
Gold Plated Ion Source To minimise the effects of source outgassing at UHV

HMT

A dual mode RGA system for vacuum diagnostics and process monitoring without differential pumping

Measures the residual gases, process contaminates and provides for leak detection

Mass range 100 amu
HMT – high pressure RGA mode Operation to 5 x 10-3 mbar
RGA – mode Detection to 2 X 10-13 mbar
Leak detection mode Set to use helium search gas as standard
Mounting flange DN-35-CF (70mm OD Conflat type)
Detector (Standard) Faraday cup
Detector (Optional) Electron multiplier

HAL 201 RC

A Residual Gas Analyser configured for demanding UHV applications

Measures the concentration of gases and vapours in real time
Mass range 200 amu
Minimum detectable concentration 5 x 10-14 mbar
Ion Source Gold plated ion source
Ion Source control Yes
Electron emission Software variable 1µA to 2mA
Electron energy Software variable 0V to 150 eV
Ion energy Software variable 0V to 10 eV
Detector Faraday cup and electron multiplier
Mounting flange DN-35-CF (2.75″/70mm OD Conflat type)

HALO 201 MBE

A residual gas system configured for molecular beam epitaxy applications

Measures residual gases and provides for contamination and leak detection in MBE systems
Mass range 200 or 300 amu
Minimum detectable partial pressure 2 x 10-13 mbar
Leak detect mode Set to use helium search gas as standard
Detector Faraday cup and Electron multiplier
Quadrupole gauge construction configured for MBE Yes
Molybdenum gauge wiring instead of copper Yes
Ion source shroud to prevent contamination Yes
Thermal extender for RGA operation during bakeout Yes (Optional)
Mounting flange DN-35-CF (70mm OD Conflat type)

XBS

A system for multiple source monitoring in MBE deposition applications

For molecular beam analysis and deposition rate control
Mass range 320 or 510 amu
Growth rate determination < 0.01 Angstrom per second, species dependant
Cross beam ion source acceptance +/-35o Beam apertures – 3D modelled
Data output Real time analogue signal outputs
Residual gas analysis mode- RGA Leak detection and chamber vacuum analysis

qRGA

A system for tokamak/torus fusion research

Measures the concentration of fusion fuel gas purity including hydrogen isotopes, deuterium in helium for example
Mass range 200 amu
Minimum detectable concentration Sub PPM detection levels
Dual mode operation Conventional RGA, TIMS
APSI -MS Appearance potential soft ionisation Yes
Automatic operation Yes
Template driven software Yes
Quantitative data output Yes
Mounting flange DN-35-CF (70mm OD Conflat type)
Detector Faraday cup and electron multiplier

3F Series / 1000 Series RGA

A system for high precision scientific and process applications

Measures the partial pressures of residual gases with ultra high resolution and extended mass range options to 1000 AMU
Mass range 50, 300, 510, or 1000 amu
Minimum detectable concentration 2 x 10-14  mbar
Ion Source Range of electron impact ion source types available
Ion Source control Yes
Electron emission Software variable 1µA to 2mA
Electron energy Software variable 0V to 150 eV
Ion energy Software variable 0V to 10 eV
Detector Faraday cup and electron multiplier
Analyser mounting flange:
6mm pole diameter Mounting flange DN-63-CF (4.5″/114mm OD Conflat type)
9mm pole diameter Mounting flange DN-100-CF (6″/150mm OD Conflat type)
6mm pole diameter systems adaptor DN-35-CF (2.75”/70mm OD Conflat type)
9mm pole diameter systems adaptor DN-63-CF (4.5”/114mm OD Conflat type)

3F-PIC / 1000 Series PIC

A system for fast event UHV studies

Measures the partial pressures of species at UHV with pulse ion counting detection
Mass range 50, 300, 510 or 1000 amu
Minimum detectable partial pressure 5 X 10-15 mbar: 1X10-16 mbar
Fast data acquisition > 500 measurements/second
Low profile ion source Optimised for desorption studies
Signal gating input 100 nano second signal gating resolution
Ion Source control Yes
Analyser mounting flange:
6mm pole diameter Mounting flange DN-63-CF (4.5″/114mm OD Conflat type)
9mm pole diameter Mounting flange DN-100-CF (6″/150mm OD Conflat type)
6mm pole diameter systems adaptor DN-35-CF (2.75”/70mm OD Conflat type)
9mm pole diameter systems adaptor DN-63-CF (4.5”/114mm OD Conflat type)

DLS-20

Ultra High Resolution Quadruple Mass Spectrometer

Specifically designed for the analysis of Hydrogen and Helium Isotopes and light gases
Mass range 20 amu in stability zone 2 and 200 amu in stability zone 1
Minimum detectable concentration < 5 x 10-15 mbar
Fast data acquisition > 500 measurements/second
Low profile ion source Optimised for desorption studies
Signal gating input 100 nano second signal gating resolution
Ion Source control Yes
Electron emission Software variable 1µA to 2mA Electron energy Software variable 0V to 150 eV
Ion energy Software variable 0V to 10 eV Detector Ion Counting Channeltron Electron multiplier digital detector
Analyser mounting flange DN-150-CF Mass filter 20 mm pole diameter

EPIC / EPIC 1000 Series

A system for UHV analysis of neutrals, radicals and ions

Measures the ions, neutrals, and partial pressures in UHV/XHV
Mass range 50, 300, 510, 1000, or 2500 amu
Pulse ion counting detector Positive and negative ion detection
DMM-dynamic multi mode Uniquely applied for the electron attachment ionization technique for electronegative gas studies
Minimum detectable partial pressure 5 X 10-15 mbar : 1X10-16 mbar
Fast measurement speed Up to 500 measurements per second
Analyser mounting flange:
6mm pole diameter Mounting flange DN-63-CF (4.5″/114mm OD Conflat type) 9mm pole diameter Mounting flange DN-100-CF (6″/150mm OD Conflat type)
6mm pole diameter systems adaptor DN-35-CF (2.75”/70mm OD Conflat type) 9mm pole diameter systems adaptor DN-63-CF (4.5”/114mm OD Conflat type)

IDP / IDP 1000 Series

A system for analysis of ions, neutrals and radicals in UHV desorption studies

Measures ions and neutrals in electron and photon stimulated desorption
Mass range 50, 300, 510, 1000, or 2500 amu
Pulse ion counting detector Positive and negative ion detection
Integral IDP ion optics Optimised for low energy ion detection in ESD or PSD studies.
DMM-dynamic multi mode Uniquely applied for the electron attachment ionization technique for electronegative gas studies
External pulse gating input 100 nano second signal gating resolution
Analyser mounting flange:
6mm pole diameter Mounting flange DN-63-CF (4.5″/114mm OD Conflat type) 9mm pole diameter Mounting flange DN-100-CF (6″/150mm OD Conflat type)
6mm pole diameter systems adaptor DN-35-CF (2.75”/70mm OD Conflat type) 9mm pole diameter systems adaptor DN-63-CF (4.5”/114mm OD Conflat type)