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3F Series / 1000 Series RGA

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A residual gas analysis

system for high precision

scientific and process

applications

The HAL 3F RC systems are designed for gas analysis in high precision scientific and process applications.

Applications

Overview

The HAL 3F RC systems are designed for gas analysis in high precision scientific and process applications.

The triple filter quadrupole minimises contamination from unwanted ions, where the pre and post RF only filters work at different selected frequency from that of the main mass filter. In combination with the longer mass filter and wider rod diameter of 9 mm, this results in increased mass resolution, ion sensitivity, stability for precision/ratio measurements and high mass transmission.

Features

Related Products

Further Reading

The system is supplied with MASsoft Professional software.

This Windows 10 and Windows 11 compatible software allows control of the instrument via USB 2.0, RS232 or Ethernet. Provides comprehensive I/O for data output and for reading data from external devices for integration and display with mass spectrometer data.

The iRGA software is a new and intuitive application for routine vacuum monitoring. It is designed to be simple and automatic.

  • automatically provides partial pressure data for the common residual gas and vapours, including hydrogen, helium, water, nitrogen, oxygen, argon and a custom gas.
  • includes a new tablet view where the background colour changes depending on alarm condition
  • includes a trend view, scan, leak detection and maintenance modes
  • includes alarm function to send alerts to internal I/O, Wi-Fi and by email