A gas analysis system for molecular beam epitaxy applications
The Hiden HALO systems are designed for RGA, gas analysis and process monitoring applications including leak detection, trend analysis and vacuum survey.
OVERVIEW
The MBE specific analyser is constructed from compatible materials and designed for prolonged use in MBE environments and includes, as standard, molybdenum wiring in place of copper and a contamination resistant ion source shroud.
FEATURES
- Molybdenum wiring in place of copper wiring to improve RGA system lifetime in MBE environments
- Contamination resistant ion source shroud
- Dual Faraday/channelplate electron multiplier
- Minimum detectable partial pressure to 2 x 10-13 mbar
- Thermal extender option for RGA operation during bakeout
BROCHURES
PRESENTATIONS
Mass Spectrometers for Residual Gas Analysis – RGA | For Applications in a Vacuum Environment (2 MB)
SOFTWARE
The system is supplied with MASsoft Professional software.
This Windows 8 compatible software allows control of the instrument via USB 2.0, RS232 or Ethernet. Provides comprehensive I/O for data output and for reading data from external devices for integration and display with mass spectrometer data.
