Plasma Characterisation

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Time-Resolved Ion Flux Measurements in Pulsed Electron-Beam-Generated Plasmas 1.92 MB

Time-resolved ion flux measurements in pulsed electron-beam-generated plasmas. ...
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Pulsed DC Operation of a Penning-Type Opposed Target Magnetron 699.44 KB

Pulsed DC operation of a Penning-type opposed target magnetron. ...
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Pressure and Input Power Dependence of Ar/N2H2 Inductively Coupled Plasma Systems 215.84 KB

Pressure and input power dependence of Ar/N2H2 inductively coupled plasma systems. ...
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Positive Sheath Behaviour in Low Pressure Argon Plasma 206.17 KB

Positive sheath behaviour in low pressure Argon plasma. ...
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Plasma Implanted Ultra Shallow Junction Boron Depth Profiles: Effect of Plasma... 618.05 KB

Plasma implanted ultra shallow junction boron depth profiles: Effect of plasma chemistry...
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Plasma Diagnostics in Large Area Plasma Processing System 111.14 KB

Plasma diagnostics in large area plasma processing system ...
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Optical Emission Spectroscopy and Energy-Resolved Mass Spectroscopy in Pulsed DC Magentron.. 290.55 KB

Optical emission spectroscopy and energy-resolved mass spectroscopy in pulsed DC...
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On the Extraction of Positive & Negative Ions from Electron-Beam-Generated Plasmas 1.71 MB

On the extraction of positive & negative ions from electron-beam-generated plasmas. ...
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Mass Spectrometric Studies of Plasmas used for Surface Treatment 293.79 KB

Mass-resolved Ion Energy Distributions in Continuous Dual Mode Microwave/Radio Frequency...
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Low Energy Ion Implantation using Non-Equilibrium Glow Discharge 1.25 MB

Low energy ion implantation using non-equilibrium glow discharge. ...