Plasma Characterisation

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Ion Energy Distributions in a Pulsed, Electron Beam-Generated Plasma 224.11 KB

Ion energy distributions in a pulsed, electron beam-generated plasma. ...
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Investigation of inductively coupled Ar and CH4/Ar plasmas and the effect of ion energy on DLC film properties. 2.21 MB

Investigation of inductively coupled Ar and CH4/Ar plasmas and the effect of ion...
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High-energy ions and atoms sputtered and reflected from a magnetron source for deposition of magnetic thin films. 158.99 KB

High-energy ions and atoms sputtered and reflected from a magnetron source for deposition...
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Extraction of positive and negative ions from electron-beam-generated plasmas. 1.42 MB

Extraction of positive and negative ions from electron-beam-generated plasmas. ...
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Energetic ion bombardment of the grounded anode in pulsed DC-glow discharges. 549.04 KB

Energetic ion bombardment of the grounded anode in pulsed DC-glow discharges. ...
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Emission characteristics of F− ions into vacuum from CaF2. 547.73 KB

Emission characteristics of F− ions into vacuum from CaF2. ...
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Electron density and ion energy dependence on driving frequency in capacitively coupled argon plasmas. 211.21 KB

Electron density and ion energy dependence on driving frequency in capacitively coupled...
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Effects of atomic chlorine wall recombination: Comparison of a plasma chemistry model with experiment. 128.09 KB

Effects of atomic chlorine wall recombination: Comparison of a plasma chemistry model...
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Diagnostics of reactive RF plasmas. 144.01 KB

Diagnostics of reactive RF plasmas. ...
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Development and evaluation of highly efficient neutral beam source. 511.02 KB

Development and evaluation of highly efficient neutral beam source. ...