Plasma Deposition

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Highly ionized fluxes of sputtered titanium atoms in high-power pulsed magnetron discharges. 530.16 KB

Highly ionized fluxes of sputtered titanium atoms in high-power pulsed magnetron...
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Effect of wall charging on an oxygen plasma created in a helicon diffusion reactor used for silica deposition. 224.49 KB

Effect of wall charging on an oxygen plasma created in a helicon diffusion reactor...
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Effect of concurrent N2+ and N+ ion bombardment on the plasma-assisted deposition of carbon nitride thin film. 48.66 KB

Effect of concurrent N2+ and N+ ion bombardment on the plasma-assisted deposition...
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Deposition of nanoscale multilayer CrN/NbN physical vapor deposition coatings by high power impulse magnetron sputtering. 1.23 MB

Deposition of nanoscale multilayer CrN/NbN physical vapor deposition coatings by...
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An investigation of the mechanisms of plasma polymerisation of allyl alcohol. 275.41 KB

An investigation of the mechanisms of plasma polymerisation of allyl alcohol. ...
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An improved method for IEDF determination in pulsed plasmas and its application to the pulsed dc magnetron. 236.15 KB

An improved method for IEDF determination in pulsed plasmas and its application to...