Plasma Etching

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Selective Etching of (Ba,Sr)TiO3 Thin Films Over Silicon in an Inductively Coupled Plasma 794.01 KB

Selective etching of (Ba,Sr)TiO3 thin films over silicon in an inductively coupled...
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Quantitative Control of Etching Reactions on Various SiOCH Materials 785.61 KB

Quantitative control of etching reactions on various SiOCH materials. ...
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Plasma Etching Selectivity of ZrO2 to Si in BCl3/Cl2 Plasmas 199.41 KB

Plasma etching selectivity of ZrO2 to Si in BCl3/Cl2 plasmas. ...
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Plasma Etching of High Dielectric Constant Materials on Silicon in Halogen Chemistries 141.61 KB

Plasma etching of high dielectric constant materials on silicon in halogen chemistries. ...
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Measurements of Neutral and Ion Composition, Neutral Temperature, and Electron Energy... 725.56 KB

Measurements of neutral and ion composition, neutral temperature, and electron energy...
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Magnetized inductively coupled plasma etching of GaN in Cl2/BCl3 plasmas. 180.34 KB

Mass spectrometry studies of resist trimming processes in HBr/O2 and Cl2/O2chemistries. ...
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Magnetized Inductively Coupled Plasma Etching of GaN in Cl2/BCl3 Plasmas 201.40 KB

Magnetized inductively coupled plasma etching of GaN in Cl2/BCl3 plasmas. ...
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Ion-Enhanced Chemical Etching of HfO2 for Integration in Metal–Oxide–Semiconductor Field... 172.17 KB

Ion-enhanced chemical etching of HfO2 for integration in metal–oxide–semiconductor...
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Ion Energy Distributions and Optical Emission Spectra in NF3-Based Process Chamber... 396.70 KB

Ion energy distributions and optical emission spectra in NF3-based process chamber...
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Investigation of the Outgassing Characteristics of the Materials Comprising a Plasma... 176.70 KB

Investigation of the outgassing characteristics of the materials comprising a plasma...