Plasma Radicals

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Threshold ionization mass spectrometry study of singlet molecular oxygen in the... 483.91 KB

Threshold ionization mass spectrometry (TIMS) has been used to measure the excited...
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Threshold Ionization Mass Spectrometry of Reactive Species in Remote Ar/C2H2 Expanding... 196.98 KB

Threshold ionization mass spectrometry of reactive species in remote Ar/C2H2expanding...
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Surface loss coefficients of CFx and F radicals on stainless steel 70.65 KB

The surface loss coefficients of CFx (x51 – 3) and F radicals have been measured...
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Study on polymeric neutral species in high-density fluorocarbon plasmas. 345.86 KB

Study on polymeric neutral species in high-density fluorocarbon plasmas. ...
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Radical density measurement at low pressure discharge denitrification by appearance mass spectrometry 1.46 MB

In discharge dentrification, radical production by electron collision with combustion...
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Quantification of a Radical Beam Source for Methyl Radicals 90.32 KB

A radical beam source for methyl radicals (CH3) was characterized applying ionization-threshold...
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Plasma diagnostic study of silicon nitride film growth in a remote Ar–H2–N2–SiH4 plasma: Role of N and SiHn radicals. 341.76 KB

Plasma diagnostic study of silicon nitride film growth in a remote Ar–H2–N2–SiH4...
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Near-surface generation of negative ions in low-pressure discharges 117.60 KB

Near-surface generation of negative ions in low-pressure discharges ...
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Measurement of absolute radical densities in plasma using modulated-beam line-of-sight TIMS 286.82 KB

Measurement of absolute radical densities in plasma using modulated-beam line-of-sight...
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Quadrrupole Mass Spectrometry characterization of low pressure microwave plasmas for atomic species production. 1.57 MB

Quadrrupole Mass Spectrometry characterization of low pressure microwave plasmas...