Plasma Characterisation

High-energy ions and atoms sputtered and reflected from a magnetron source for deposition...

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Extraction of positive and negative ions from electron-beam-generated plasmas. ...

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Energetic ion bombardment of the grounded anode in pulsed DC-glow discharges. ...

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Emission characteristics of F− ions into vacuum from CaF2. ...

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Electron density and ion energy dependence on driving frequency in capacitively coupled...

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Effects of atomic chlorine wall recombination: Comparison of a plasma chemistry model...

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Diagnostics of reactive RF plasmas. ...

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Development and evaluation of highly efficient neutral beam source. ...

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Correlating ion energies and CF2 surface production during fluorocarbon plasma processing...

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