Studies of film deposition in fluorocarbon plasmas employing a small gap structure.
Quadrupole mass spectrometry and time-of-flight analysis of ions resulting from 532 nm pulsed laser ablation of Ni, Al, and ZnO targets.
Plasma dynamic in chromium and titanium HIPIMS discharges.
Physics of High Power Impulse Magnetron Sputtering.
Organic films prepared by polymer sputtering.
On the plasma polymerisation of allyl alcohol : an investigation of ion–molecule reactions using a selected ion flow tube.
Mechanism of the film composition formation during magnetron sputtering of WTi.
Mass spectrometric study of the radiofrequency-induced plasma polymerisation of styrene and propenoic acid.
Mass spectral investigation of the plasma phase of a pulsed plasma of acrylic acid.