by Caroline Wardropper | Jan 10, 2022
Time-averaged and time-resolved ion fluxes related to reactive HiPIMS deposition of Ti-Al-N films
by Caroline Wardropper | Jan 10, 2022
Comprehensive Data Collection Device for Plasma Equipment Intelligence Studies
by Caroline Wardropper | Jan 10, 2022
Ion and Radical Characteristics (Mass/Energy Distribution) of a Capacitively Coupled Plasma Source Using Plasma Process Gases (CxFy)
by Caroline Wardropper | Jan 10, 2022
Reactive HiPIMS deposition of Al-oxide thin films using W-alloyed Al targets
by Caroline Wardropper | Jan 7, 2022
Plasma-enhanced atomic layer deposition: Correlating O2 plasma parameters and species to blister formation and conformal film growth