fbpx
Select Page
[featured_image]
Download
Download is available until [expire_date]
  • Version
  • Download 5
  • File Size 462.00 KB
  • File Count 1
  • Create Date August 25, 2016
  • Last Updated August 25, 2016

Correlating ion energies and CF2 surface production during fluorocarbon plasma processing of silicon.

Correlating ion energies and CF2 surface production during fluorocarbon plasma processing of silicon.