Correlating ion energies and CF2 surface production during fluorocarbon plasma processing of silicon.

Aug 25, 2016

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Correlating ion energies and CF2 surface production during fluorocarbon plasma processing of silicon.

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Correlating ion energies and CF2 surface production during fluorocarbon plasma processing of silicon.

Correlating ion energies and CF2 surface production during fluorocarbon plasma processing of silicon.

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