Dedicated Probe for SIMS/SNMS


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Create Date4th October 2016
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The Hiden EQS-series of quadrupole mass spectrometer probes were introduced for measurement of external ions in a vacuum environment, specifically for application to the SIMS surface analysis technique. The systems are now even further enhanced by the addition of a new high-efficiency electron bombardment ion source mounted at the immediate entry region to the probe for direct measurement of secondary neutrals (SNMS), enabling quantification of concentration over the full abundance range from trace level to 100%.