Diagnostic analysers for in-vacuum procedures


Download27
Stock
File Size196.59 KB
Create Date5th October 2016
Download

Hiden quadrupole mass spectrometer residual gas analysers(RGA’s) ensure detailed real-time analysis of in-vacuum species and their relative partial pressures, determining pre-process vacuum quality with positive identification of vacuum-limiting species such as excessive levels of air, water vapour, hydrocarbons, cleaning solvents, process gas leakages. The integral leak detection mode features exceptional sensitivity for helium and is user-tunable for selection of any preferred alternative search gas within the instruments mass range.