Diagnostic Tools for Atomic Layer Deposition


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Create Date27th July 2017
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Hiden Analytical offers a range of mass spectrometer products of special significance to the process and post-process stages of atomic layer deposition(ALD) and evaluation.

Systems are available to monitor gaseous species through the pressure range from ultra-high vacuum through to the millibar regime, from in-process residual gas analysers through to the HPR-30ALD differentially pumped probes for the highest process pressures.