Dry etching of (Pb,Sr) TiO3 thin films using inductively coupled plasma.

Aug 25, 2016

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Dry etching of (Pb,Sr) TiO3 thin films using inductively coupled plasma.

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Dry etching of (Pb,Sr) TiO3 thin films using inductively coupled plasma.

Dry etching of (Pb,Sr) TiO3 thin films using inductively coupled plasma.

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