Effect of the Gas Mixing Ratio on the Plasma Parameters and the Gas Phase Composition in Cl2/CF4 Inductively Coupled Plasmas.

Aug 25, 2016

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Effect of the Gas Mixing Ratio on the Plasma Parameters and the Gas Phase Composition in Cl2/CF4 Inductively Coupled Plasmas.

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Effect of the Gas Mixing Ratio on the Plasma Parameters and the Gas Phase Composition in Cl2/CF4 Inductively Coupled Plasmas.

Effect of the Gas Mixing Ratio on the Plasma Parameters and the Gas Phase Composition in Cl2/CF4 Inductively Coupled Plasmas.

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