Etching characteristics and mechanisms of the MgO thin films in the CF4/Ar inductively coupled plasma.

Aug 25, 2016

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Etching characteristics and mechanisms of the MgO thin films in the CF4/Ar inductively coupled plasma.

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Etching characteristics and mechanisms of the MgO thin films in the CF4/Ar inductively coupled plasma.

Etching characteristics and mechanisms of the MgO thin films in the CF4/Ar inductively coupled plasma.

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