Formation of SCF+SCF2 and CS2 + ions during gas modulation cycles associated with interference between alternating C4F8 and SF6 in Ar plasma

Jan 26, 2026

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Formation of SCF+SCF2 and CS2 + ions during gas modulation cycles associated with interference between alternating C4F8 and SF6 in Ar plasma

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Formation of SCF+SCF2 and CS2 + ions during gas modulation cycles associated with interference between alternating C4F8 and SF6 in Ar plasma

Formation of SCF+SCF2 and CS2 + ions during gas modulation cycles associated with interference between alternating C4F8 and SF6 in Ar plasma

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