The Hiden HALO MBE In-process Vacuum Monitor


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Create Date4th October 2016
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Many vacuum-related processes operate at high/ultra-high vacuum levels and the quadrupole mass spectrometer is routinely used for measurement of vacuum quality, for leak detection and for process monitoring. Such processes involving thin-film preparation and etching can however produce an unfavourable mass spectrometer environment due to the potential condensation of both conducting and insulating films.