Hiden PSM Probes Plasma Ions


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File Size3.42 MB
Create Date4th October 2016
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The Hiden differentially pumped PSM plasma probe provides measurement of the key parameters required for establishing the reaction chemistry of diverse plasma and pulsed-plasma processes. The integrated quadrupole mass spectrometer (QMS) and Bessel-box energy analyser generate detailed diagnostics identifying positive plasma ion species and intensities, and ion energies within a +/- 100eV energy window.