Hiden PSM Probes Plasma Ions

File Size3.42 MB
Create Date4th October 2016

The Hiden differentially pumped PSM plasma probe provides measurement of the key parameters required for establishing the reaction chemistry of diverse plasma and pulsed-plasma processes. The integrated quadrupole mass spectrometer (QMS) and Bessel-box energy analyser generate detailed diagnostics identifying positive plasma ion species and intensities, and ion energies within a +/- 100eV energy window.