Highly anisotropic gate electrode patterning in neutral beam etching using F2 gas chemistry.

Aug 25, 2016

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Highly anisotropic gate electrode patterning in neutral beam etching using F2 gas chemistry.

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Highly anisotropic gate electrode patterning in neutral beam etching using F2 gas chemistry.

Highly anisotropic gate electrode patterning in neutral beam etching using F2 gas chemistry.

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